Integration of Micro-Light-Emitting-Diode Arrays and Silicon Driver for Heterogeneous Optoelectronic Integrated Circuit Device
نویسندگان
چکیده
In this paper, we proposed the possibility of implementing a single chip device for realizing optoelectronic integrated circuits (OEICs). Micro-lightemitting-diode (LED) arrays and a complementary metal–oxide–semiconductor (CMOS) pulse width modulation (PWM) silicon driver were proposed, designed, and fabricated on a single chip. The micro-LED arrays were separated by a dry etching method into 64 pixels of 8 8, each with a size of 30 30 m and operated in 3V at 100 A. The PWM Si driver was well operated and modulated using various control signals. Furthermore, to investigate the driver for handling massive parallel information, a simple multifunctional driver was designed, fabricated, and flipchip-bonded using a gold compliant bump and anisotropic conductive adhesive with micro-LED arrays. # 2011 The Japan Society of Applied Physics
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